Across
- 5. Reaction that forms an oxide layer on a material surface
- 7. Mechanical action used to smooth a material surface
- 10. Electrically insulating material commonly used in semiconductor devices
- 12. Protecting selected surface regions from being etched
- 13. Electrical potential applied to influence ion energy at a wafer surface
- 14. Solid source material bombarded by ions during sputter deposition
- 15. Thin slice of semiconductor material used to fabricate integrated circuits
Down
- 1. Process of forming a thin layer of material on a surface
- 2. Localized protection that causes unwanted tiny surface features during etching
- 3. Measure of how consistently a film thickness or etch depth is distributed
- 4. Lateral removal of material beneath a mask during etching
- 6. Enclosed vessel in which semiconductor etching or deposition takes place
- 8. Chemical process involving species that react with the material being etched
- 9. Base surface on which a thin film is deposited
- 11. Amount of material removed per unit time during etching