Photolithography Terminology

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Across
  1. 3. a microfabrication process that uses light to transfer geometric patterns from a photomask onto a light-sensitive chemical called a photoresist
  2. 6. a high-precision glass or quartz plate containing microscopic, light-blocking patterns of an integrated circuit or device
  3. 7. a sliver of semiconductor material used in electronics
  4. 8. critical thermal steps that drive off solvents, crosslink polymers, and stabilize photoresist patterns
  5. 9. after photoresists is applied this process removes the exposed substrate beneath
  6. 10. a curved, transparent piece of glass or plastic used to refract and focus light
  7. 12. a form of electromagnetic radiation that can be perceived by the human eye
  8. 15. the process of manufacturing miniature structures, components, and devices with features measured in micrometers (microns) or smaller
  9. 17. a chemical solution or mixture used to trigger a specific, visible physical or chemical change
  10. 18. the process of projecting a pattern onto a substrate coated with a photosensitive polymer (photoresist)
  11. 20. a tiny, flat piece of semiconductor material (usually silicon) that holds thousands to billions of microscopic electronic components
Down
  1. 1. a light-sensitive organic polymer used in photolithography and photoengraving to create patterned coatings
  2. 2. a precise manufacturing process that uses light-sensitive resist and chemical etchants to remove selected areas of metal, creating intricate, burr-free, and stress-free components
  3. 3. the act of creating, copying, or arranging things following a specific sequence, rule, or decorative design
  4. 4. a foundational surface, layer, or substance upon or through which a process occurs
  5. 5. an invisible form of high-energy electromagnetic radiation found naturally in sunlight
  6. 11. a printing method based on the chemical principle that oil and water repel each other
  7. 13. advanced, high-precision semiconductor manufacturing machines that transfer microscopic circuit patterns from a photomask onto silicon wafers using light
  8. 14. a foundational photolithography technique used to manufacture semiconductors
  9. 16. a protective or decorative layer applied to the surface of a material
  10. 19. a hard, brittle metalloid and the second most abundant element in the Earth's crust